ISO 23131-2021 橢偏測量--原理 Ellipsometry — Principles 

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.st edition 2021-04 Ellipsometry — Principles Ellipsométrie — Principes Reference number ISO 23131:2021(E) ？ ISO 2021 ISO 23131:2021(E) COPYRIGHT PROTECTED DOCUMENT ？ ISO 2021 All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may be reproduced or utilized otherwise in any form